Why 99.999% xenon is critical for plasma etching, MEMS production & radiation detection.  Learn specs, contamination risks & sourcing strategies for fabs.

1. Plasma Etching Applications

Etching silicon nitride (Si₃N₄) at <100nm nodes.

XeF₂ gas: Isotropic silicon etching for MEMS.

2. Radiation Detection

Dark matter experiments (LUX-ZEPLIN).

Purity needs: <0.1 ppb Kr-85 for low-background detection.

3. Quality Control Standards

SEMI C3.41 specifications for Xe.

Analytical methods: GC-MS, FTIR for impurity screening.

4. Cost Optimization Strategies

Xenon recovery/recycling systems (up to 95% reclaim).

Long-term supply contracts to hedge price volatility.

5. Emerging Uses

Quantum computing (qubit cooling).